Apo Sila Seramika Alumina Maʻemaʻe Kiʻekiʻe no ke Sila ʻana o ke Keʻena Mahana Kiʻekiʻe

Ua hoʻolālā ʻia ke apo sila keramika a St.Cera ma ke ʻano he koho ʻē aʻe i nā apo O-polymer i nā wahi koʻikoʻi kahi e hōʻino ai nā elastomers. Hana ʻia mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃), hoʻohana ʻia kēia apo sila paʻa i nā noi sila static - i hui pū ʻia me kahi metala palupalu a i ʻole gasket graphite - e hāʻawi i ka vacuum hilinaʻi a i ʻole ka paʻa kinoea ma nā mahana a hiki i 800°C a ma nā wahi plasma a i ʻole nā ​​​​​​kemika. Hāʻawi ka mea i ka ʻole o ka outgassing, ka ikaika compressive kiʻekiʻe (ka ikaika flexural ma lalo 361 MPa), a me ka inertness kemika (kū i nā halogens, nā waikawa, a me nā alkalis koe wale nō HF). ʻO nā ʻili sila i hoʻopaʻa ʻia me ka pololei (flatness ≤5 μm, surface roughness Ra ≤0.2 μm) e hōʻoia i ka pili paʻa ʻana me nā metala pili a i ʻole nā ​​​​​​mea keramika.

Nā kikoʻī(ma muli o 99.8% Al₂O₃):

Nā noi:

• · Nā sila paʻa o ke keʻena hana semiconductor (CVD, PVD, etch)
• · Nā sila puka umu wela kiʻekiʻe
• · Nā flanges feedthrough vacuum
• · Nā pani ʻana o ka ipu reactor kemika

Kaʻina Hana Hana:

Kaomi ʻana o Isostatic → sintering ma 1600°C → lapping ʻaoʻao pālua pololei e hoʻokō i nā helehelena sila palahalaha a laumania → chamfering lihi → hoʻomaʻemaʻe ultrasonic. Ua hoʻāʻo ʻia kēlā me kēia apo i ka 100% leak-hoʻāʻo ʻia ma kahi mea ʻike leak helium me kahi gasket metala maʻamau.

Mana Hoʻomalu Kūlana:

• · Nānā ʻana i ka nui o CMM (ID, OD, mānoanoa, parallelism)
• · Ka hoʻohana ʻana i ka ʻili no Ra a me ka waviness
• · Ke ana ʻana o ka pālahalaha me ka hoʻohana ʻana i ka pālahalaha optical
• · Hoʻāʻo leaka Helium (ʻano hoʻihoʻi-kaomi ʻana)

Nā pono ma luna o nā apo-O Polymer:

• · Kū i ka 800°C vs. <300°C no FFKM
• · ʻAʻohe hoʻokuʻu ʻana i ke kinoea - ʻaʻohe haumia o ke kaiapuni hakahaka
• · Kūpaʻa i nā kemika plasma āpau (fluorine, chlorine, oxygen)
• · ʻAʻohe hoʻonohonoho hoʻopaʻa a i ʻole ka deformation mau loa
• · Ke ola lawelawe palena ʻole ma nā wahi maʻemaʻe

Nā Palena (Nā Manaʻo Koʻikoʻi):

• · ʻAʻole he apo-O— he apo keramika paʻa ia e pono ai kahi gasket palupalu (keleawe, alumini, a graphite paha) e sila ai.
• · ʻAʻole ia e ʻae i ka neʻe ʻana o ka ikaika a i ʻole ka hewa o ka flange nui.
• · ʻOi aku ke kumukūʻai mua ma mua o nā apo-O polymer, akā ʻoi aku ka lōʻihi o ke ola e hōʻemi ana i ke kumukūʻai o ka loaʻa ʻana.
• · Palupalu — e lawelawe me ke akahele; e pale i ka hopena o ke kiko a i ʻole ke koʻikoʻi kūlou.

Hoʻomaopopo:Ua hahai pono ka ʻikepili ma luna i ka papa waiwai Al₂O₃ i hāʻawi ʻia. ʻAʻohe ʻikepili no nā mea elastomeric i hāʻawi ʻia. He apo sila paʻa kēia huahana, ʻaʻole he apo-O elastomeric. E ʻoluʻolu e hōʻoia inā kūpono kēia i kāu mau koi noi.