ʻO ke koʻokoʻo wahi keramika alumina kikoʻī no nā mea hoʻopaʻa semiconductor
ʻO ke koʻokoʻo wahi keramika a St.Cera i wili pololei ʻia mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃). Hāʻawi ia i ka paʻakikī kiʻekiʻe (16 GPa), ke kūpaʻa maikaʻi loa i ka ʻaʻahu ʻana, a me ke kūpaʻa o ka dimensional. ʻO ke anawaena e like me ka paʻa o ±0.005 mm, ka lōʻihi a hiki i 150 mm. Hoʻopili ʻia ka ʻili o ke koʻokoʻo iā Ra ≤0.2 μm no ka hoʻokomo maʻalahi a me ka wehe ʻana. Hoʻohana ʻia ma ke ʻano he mau pine alignment, nā pine dowel, a i ʻole nā mea hoʻōki kūlana i nā mea hana semiconductor, nā cassettes wafer, a me nā lako nānā.
Nā kikoʻī (ma muli o 99.8% Al₂O₃):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Modulus o Young | 380 GPa |
| Pae Anawaena | 1–20 mm |
| Ka laulā lōʻihi | 5–150 mm |
Nā noi:
- · Nā pine hoʻonohonoho cassette Wafer
- · Nā ʻūpā alakaʻi pine hāpai
- · Nā dowels e ʻimi ana i nā mea paʻa
- · Nā pou hoʻonohonoho kāleka Probe
Nā Pōmaikaʻi ma luna o ke kila:
- · ʻAʻole makeneka, kūpaʻa i ka pala
- · ʻAʻohe hanauna ʻāpana mai ka ʻaʻahu ʻana
- · Hoʻokaʻawale uila (>10¹⁴ Ω·mm²/m)
Hoʻopilikino ʻana:
Nā wēlau i hoʻokaʻawale ʻia, nā anawaena ʻanuʻu, nā lua wili, a i ʻole nā kikona piko maʻamau.
