I hui pū ʻia me nā pono hana piha o nā mea substrate Al2O3 a me BeO kuʻuna, ʻo ka keramika Aluminum Nitride (AlN), nona ka conductivity thermal kiʻekiʻe (ʻo ka conductivity thermal theoretical o ka monocrystal he 275W/m▪k, ʻo ka conductivity thermal theoretical o ka polycrystal he 70 ~ 210W/m▪k), ka dielectric constant haʻahaʻa, ka coefficient hoʻonui thermal i hoʻohālikelike ʻia me ka silicon kristal hoʻokahi, a me nā waiwai insulation uila maikaʻi, he mea kūpono ia no nā substrates circuit a me ka hoʻopili ʻana i ka ʻoihana microelectronics. He mea nui nō hoʻi ia no nā ʻāpana keramika hoʻonohonoho wela kiʻekiʻe ma muli o nā waiwai mechanical wela kiʻekiʻe maikaʻi, nā waiwai thermal a me ke kūpaʻa kemika.
ʻO ke kumumanaʻo o ka nui o AlN he 3.26g/cm3, ʻo ka paʻakikī MOHS he 7-8, ʻoi aku ka nui o ke kū'ē ʻana i ka mahana o ka lumi ma mua o 1016Ωm, a ʻo ka hoʻonui wela he 3.5 × 10-6/℃ (mahana o ka lumi he 200 ℃). ʻAʻohe kala a moakāka nā keramika AlN maʻemaʻe, akā he mau kala like ʻole lākou e like me ka hina, keʻokeʻo hina a i ʻole ka melemele māmā, ma muli o nā haumia.
Ma waho aʻe o ka conductivity thermal kiʻekiʻe, loaʻa i nā keramika AlN nā pono penei:
1. Maikaʻi ka pale uila;
2. ʻO ke ʻano hoʻonui wela like me ka silicon monocrystal, ʻoi aku ka maikaʻi ma mua o nā mea e like me Al2O3 a me BeO;
3. Ka ikaika mechanical kiʻekiʻe a me ka ikaika flexural like me nā keramika Al2O3;
4. Ka paʻa dielectric maʻamau a me ka pohō dielectric;
5. Ke hoʻohālikelike ʻia me BeO, ʻaʻole i hoʻopilikia nui ʻia ka conductivity thermal o nā keramika AlN e ka mahana, ʻoi aku hoʻi ma luna o 200 ℃;
6. Ke kūpaʻa wela kiʻekiʻe a me ke kūpaʻa ʻana i ka pala;
7. ʻAʻohe ʻawahia;
8. E hoʻopili ʻia i ka ʻoihana semiconductor, ka ʻoihana metallurgy kemika a me nā ʻoihana ʻē aʻe.
Ka manawa hoʻouna: Iulai-14-2023