Papa Seramika Alumina Maʻemaʻe Kiʻekiʻe - no ka Insulation a me nā Mea Hana Mahana Kiʻekiʻe
Hana ʻia ka pā keramika a St.Cera mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃), e hāʻawi ana i ka ikaika dielectric kiʻekiʻe (15 × 10⁶ V/m), ke kūpaʻa wela a hiki i 1600 °C, a me ke kūpaʻa ʻana i ka ʻaʻahu maikaʻi loa. Hoʻopili pololei ʻia nā pā e hoʻokō i ka pālahalaha ≤5 μm ma luna o 100 mm a me ka ʻoʻoleʻa o ka ʻili Ra ≤0.4 μm. Loaʻa i nā mānoanoa maʻamau mai 1 mm a 20 mm, nā nui maʻamau a hiki i 500 × 500 mm. Hoʻohana ʻia ma ke ʻano he mau mea hoʻokaʻawale uila, nā kumu hoʻomehana, nā liner keʻena, a me nā substrates vacuum chuck.
Nā kikoʻī (ma muli o 99.8% Al₂O₃):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Ikaika Dielectric | 15×10⁶ V/m |
| Ke kū'ē kiko'ī | >10¹⁴ Ω·mm²/m |
| Ka Hoʻokele Wela | 32 W/m·k |
| Hoʻonui Wela (25-1000°C) | 7.2×10⁻⁶/℃ |
| Mahana Hana Loa | 1600°C |
| Palahalaha (no 100 mm) | ≤5 μm |
| Ka hoʻomanawanui mānoanoa | ±0.05 mm |
| ʻO ka ʻōʻili | Ra ≤0.4 μm |
Nā noi:
- · Nā papa hoʻokaʻawale uila i nā lako uila kiʻekiʻe
- · Nā papa kākoʻo mea hoʻomehana i loko o nā umu hoʻolaha
- · Nā liner keʻena no CVD/PVD
- · Nā papa kumu no nā ʻūpā vacuum
Nā Pōmaikaʻi:
- · 0% omo wai - ʻaʻohe puka ʻana o ke kinoea i loko o ka vacuum
- · ʻAʻohe hana kemika - kū i nā waikawa a me nā halogens (koe naʻe ʻo HF)
Hoʻopilikino ʻana:
Loaʻa nā lua, nā ʻokiʻoki, ka hoʻopuni ʻana o ka lihi, a me ka metallization.
