Papa Wili ʻAlumina Ceramic Kiʻekiʻe-Maʻemaʻe no ka Lapping Precision
ʻO St.Cerapā wili keramikaHana ʻia mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃) no nā noi lapping a me ka wili pololei. Loaʻa i kā mākou hiki ke wili pololei ka pālahalaha o 0.003mm, parallelism o 0.002mm, a me ka hoʻopau ʻana o ka ʻili o Ra0.1, e hōʻoiaʻiʻo ana i ka wehe like ʻana o nā mea ma ka ʻili holoʻokoʻa o ka pā. Hāʻawi ka pā i ke kūpaʻa ʻaʻahu maikaʻi loa (Vickers 16 GPa), ka ikaika flexural kiʻekiʻe (361 MPa), a me ke kūpaʻa wela a hiki i 800°C. Loaʻa i nā ʻano poepoe a hiki i ke anawaena 600mm a me nā pā rectangular a hiki i ka lōʻihi 1500mm. Loaʻa nā ʻili grooved (ka laulā groove 0.5–2.0mm) no ka hoʻolaha slurry i nā kaʻina hana lapping. Nānā ʻia kēlā me kēia pā me ka laser interferometer a hāʻawi ʻia me kahi hōʻike ana pololei.
Nā kikoʻī (ma muli o 99.8% Al₂O₃& nā hiki ke hana ʻo St.Cera):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Anawaena Waho (max) | 600mm |
| Ka lōʻihi (max) | 1500mm |
| Mānoanoa (max) | 100mm |
| Palahalaha | 0.003mm |
| Parallelism | 0.002mm |
| Hoʻopau ʻili | Ra0.1 |
| Mahana Hana Loa | 800°C |
Nā noi:
- · Ke kāʻei ʻana i nā substrates keramika a me nā sila metala
- · Ke wili ʻana i nā wafers semiconductor ma ka ʻaoʻao hope
- · Hoʻopili ʻia nā mea ʻōpae
- · Ka hoʻopili ʻana i ka substrate nui
Nā hiki ke kikoʻī:
- · Pololei: 0.005mm
- · Kūlike: 0.005mm
- · Pōʻai: 0.002mm
