ʻO Alumina Vacuum Chuck no ka Precision Dicing & Grinding
Hana ʻia ka ʻūpā vacuum alumina a St.Cera mai ka 99.8% Al₂O₃ kiʻekiʻe me nā ʻauwaha vacuum i hana pololei ʻia. Loaʻa i kā mākou hiki ke wili pololei ka palahalaha o 0.003mm a me ka parallelism o 0.002mm, e hōʻoiaʻiʻo ana i ka hoʻopaʻa ʻana o ka wafer warp-free i ka wā o ka dicing, ka wili ʻana i hope, a me ka nānā ʻana. Hāʻawi ka mea i ka ikaika flexural kiʻekiʻe (361 MPa), ka paʻakikī (16 GPa), a me ke kūpaʻa wela a hiki i 800°C. Loaʻa i nā ʻano poepoe a hiki i ke anawaena waho 600mm (OD) a me nā ʻano rectangular a hiki i ka lōʻihi 1500mm. Hoʻolālā kūikawā ʻia nā ʻauwaha vacuum (concentric, radial, a i ʻole nā ʻano grid) e kūpono i nā koi hana kikoʻī. Nānā ʻia kēlā me kēia ʻūpā me ka laser interferometer a hāʻawi ʻia me kahi hōʻike hōʻoia palahalaha.
Nā kikoʻī (ma muli o 99.8% Al₂O₃& nā hiki ke hana ʻo St.Cera):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Anawaena Waho (max) | 600mm |
| Mānoanoa (max) | 100mm |
| Ka lōʻihi (max) | 1500mm |
| Palahalaha | 0.003mm |
| Parallelism | 0.002mm |
| Hoʻopau ʻili | Ra0.1 |
| Mahana Hana Loa | 800°C |
Nā noi:
- · ʻOki ʻana a me ke kahakaha ʻana i ka wafer (200mm/300mm a ʻoi aku ka nui)
- · Ke wili ʻana i nā wafers lahilahi ma ka ʻaoʻao hope
- · Nānā ʻana i ka ʻike maka a me ka nānā ʻana
- · Ka lawelawe ʻana i ka substrate nui
Ka pololei o ka hana ʻana:
- · Pololei: 0.005mm
- · Kūlike: 0.005mm
- · Pōʻai: 0.002mm
- · Kūlike: 0.01mm
