ʻO ka Alumina-Based Standard Vacuum Chuck - Paʻa Kiʻekiʻe no ka Mīkini Precision
Hana ʻia kēia ʻūpā vacuum i hoʻokumu ʻia i ka alumina mai 99.8% Al₂O₃, e hāʻawi ana i kahi ʻili laumania ʻaʻole porous me nā ʻano groove vacuum maʻamau. Hāʻawi ia i ka paʻakikī kūikawā (Young's modulus 380 GPa) a me ka pālahalaha (≤3 μm), e kūpono ai no ka wili pololei, ka lapping, a me ka dicing o nā wafers semiconductor a me nā ʻāpana optical. ʻO ka conductivity thermal kiʻekiʻe o ka mea (32 W/m·k) e hōʻoia i ka like ʻana o ka mahana i ka wā e hana ai.
Nā kikoʻī(ma muli o 99.8% Al₂O₃):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Modulus o Young | 380 GPa |
| Ka Hoʻokele Wela | 32 W/m·k |
| Palahalaha | ≤3 μm (ʻoi aku ma mua o 200mm) |
| ʻO ka ʻilikai (ʻaoʻao chuck) | Ra ≤0.4 μm |
| Mahana Hana Loa | 800°C |
Nā noi:
- · Wili ʻana o ka ʻaoʻao hope o ka wafer (ʻāwili a lahilahi)
- · ʻO ka ʻoki pololei ʻana i nā mea palupalu
- · Ka hoʻopili ʻana i nā substrates keramika
- · Hoʻowali aniani maka
Hana ʻana:
Ka ʻūmiʻi pololei ʻana o nā ʻaoʻao ʻelua → ke kahakaha ʻana o ka daimana (koho) → ka hoʻopuni ʻana o ka lihi → ka hoʻomaʻemaʻe ultrasonic → ka nānā ʻana i ka palahalaha 100% me ka laser interferometer.
Anā pono:
- · Hoʻemi ke kākoʻo paʻa i ka deflection ma lalo o ke kaumaha
- · ʻAʻohe hanauna ʻāpana mai ka ʻōnaehana porous
- · Maʻalahi e hoʻomaʻemaʻe (kūpono me ka holoi ʻana i ka solvent)
- · Hiki ke hoʻopilikino ʻia nā ʻauwaha vacuum (concentric, radial, nā ʻano maʻamau)
Nā Nui i Loaʻa:
Poepoe: 100mm, 150mm, 200mm, 300mm; huinahā/ʻehā huinahā ma ke noi.
Hāʻawi pū mākou i nā mana i hoʻokumu ʻia i ka metala no ka ikaika mechanical kiʻekiʻe.
