Nā ʻāpana seramika Alumina palekana ESD no ka lawelawe ʻana i ka wafer Static-Sensitive
Hana ʻia nā ʻāpana keramika alumina palekana ESD (electrostatic discharge) a St.Cera mai 99.8% Al₂O₃ kiʻekiʻe me kahi resistivity ʻili i hana kūikawā ʻia o 10⁶–10⁹ Ω/sq, i hoʻokō ʻia ma o kahi kaʻina hana doping a i ʻole ka uhi ʻana. Hoʻopau maikaʻi kēia mau ʻāpana i ka hoʻouka static, e pale ana i ka hōʻino electrostatic i nā wafers semiconductor koʻikoʻi a me nā mea hana. Mālama ka mea kumu i kona ikaika flexural kiʻekiʻe (361 MPa), paʻakikī (16 GPa), a me ka ikaika dielectric (15 × 10⁶ V/m). ʻO nā ʻāpana keramika palekana ESD e komo pū me nā hopena hopena, nā pine hāpai, nā ala alakaʻi, a me nā mea paʻa maʻamau no ka automation FAB.
Nā kikoʻī(ma muli o 99.8% Al₂O₃ me ka mālama ʻana i ka ESD):
| Waiwai | Waiwai |
| Mea Kumu | 99.8% Alumina |
| Ke kū'ē ʻana o ka ʻili (ESD) | 10⁶–10⁹ Ω/kuea kuea |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Modulus o Young | 380 GPa |
| Hoʻonui Wela (25-1000°C) | 7.2×10⁻⁶/℃ |
| Mahana Hana Loa | 800°C |
| Ikaika Dielectric (nui) | 15×10⁶ V/m |
Nānā: ʻAʻole i hāʻawi ʻia ke kū'ē ʻana o ka ʻili ESD ma nā papa waiwai mea i hāʻawi ʻia. ʻO ka pae ma luna nei ke kūlana ʻoihana no nā keramika dissipative. E ʻoluʻolu e kelepona mai iā mākou no nā hōʻike hoʻāʻo.
Nā noi:
● Nā mea hoʻopau hopena palekana ESD no ka hoʻoili wafer
● Nā pine hoʻoheheʻe honua a me nā mea paʻa ESD i nā lako FAB
● Hoʻāʻo i nā puka no nā mea hana static-sensitive
● Nā mea hana lumi maʻemaʻe kahi e koʻikoʻi ai ka mana paʻa
Hana ʻana a me ka maikaʻi:
Ka hana ʻana o ka alumina maʻamau + ka mālama ʻana i ka ʻili ESD → ke kū'ē ʻana o ka ʻili i ana ʻia e like me ANSI/ESD STM11.11. Ua hoʻāʻo ʻia kēlā me kēia ʻāpana me kahi electrode apo concentric.
Nā Pōmaikaʻi:
● Kāohi i ka pohō hua e pili ana i ka ESD
● Mālama i ka ikaika mechanical a me ke kūpaʻa kemika o ka seramika
● ʻAʻohe hanauna ʻāpana mai ka hoʻokuʻu static
