ʻO Porous Ceramic Vacuum Chuck no ka lawelawe ʻana i ka wafer warped
Ua hana ʻia ka chuck keramika porous a St.Cera mai ka alumina maʻemaʻe kiʻekiʻe me ka porosity hāmama like o 30-45% a me nā nui o nā pore mai 10 a 100 μm. ʻAʻole e like me nā chucks grooved maʻamau, hāʻawi ka ʻili porous i ka vacuum i hoʻolaha ʻia ma ka ʻaoʻao hope o ka wafer holoʻokoʻa, e paʻa pono ana i nā wafers warped, lahilahi, a i ʻole singulated me ka ʻole o ka hāpai ʻana o ka lihi a haki paha. ʻO ka vacuum mālie (hiki ke hoʻololi ʻia ma o ka restrictor) e pale aku i ka māka ʻaoʻao hope.
Nā kikoʻī(ma muli o 99.6% Al₂O₃):
| Waiwai | Waiwai |
| Ka porosity | 30–45% |
| Ka nui o nā poho awelika | 10–100 μm (hiki ke koho ʻia) |
| Ikaika Flexural | ≥250 MPa |
| Palahalaha (ma luna o 300mm) | ≤5 μm |
| Hoʻopau ʻili | Hoʻopaʻa ʻia (Ra 0.8 μm) |
| Pae Vacuum Max | -80 kPa |
| Mahana Hana | 400°C (ea), 600°C (inert) |
| Mea Hana | 99.6% Al₂O₃, ZrO₂, a i ʻole SiC |
Nā noi:
ʻO ka wili ʻana o ka wafer lahilahi (≤50 μm) ma ka ʻaoʻao hope
Ka hoʻopaʻa ʻana o ka wafer warped no ka dicing
Ka ʻohi ʻana i ka make hoʻokahi mai ka lipine
Ka lawelawe ʻana i nā panela aniani
Hana ʻana a me ka maikaʻi:
Pauka seramika i kāwili ʻia me nā mea hana pore organik → kaomi ʻia → sintered → lapped a hiki i ka mānoanoa hope loa. Hoʻāʻo ʻia kēlā me kēia chuck no ke ʻano like o ka vacuum (≤5% deviation) a nānā ʻia no ka hoʻolaha nui o ka pore (SEM). Ana ʻia ka pālahalaha me ka laser interferometer.
Nā Pono ma luna o nā Grooved Chucks:
ʻAʻohe māka lihi wafer a i ʻole ka hoʻololi make
Paʻa i nā wafers i wili ʻia (a hiki i ka 500 μm bow)
Hoʻopau i ka pani ʻana o ka lua hakahaka
Kākoʻo hoʻohālikelike ponoʻī no nā substrates lahilahi
Hoʻopilikino ʻana:
Nā ʻano poepoe a ʻehā paha, ka nui a hiki i ka 600 mm. Hiki iā mākou ke hoʻopili i nā apo sila lihi a i ʻole nā māhele vacuum zone. Loaʻa nā mana metala no nā koi paʻa kiʻekiʻe.
E noi i kahi hāpana no kāu nui wafer a me ka hoʻāʻo warpage.
