12-'Īniha Alumina Vacuum Chuck no ka hana ʻana i ka wafer 300mm
Ua hana ʻia ka mīkini hoʻomaʻemaʻe 12-'īniha a St.Cera me ka pololei mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃) no ka lawelawe ʻana i ka wafer 300mm. Loaʻa i ka mīkini kahi ʻili maikaʻi me nā grooves (ka laulā o ke groove 0.5–1.0 mm, pitch 2–3 mm) e hōʻoia i ka hoʻolaha like ʻana o ka vacuum ma ke anawaena holoʻokoʻa 300mm. Mālama ʻia ka pālahalaha i loko o 5 μm, e hiki ai ke hoʻopaʻa ʻia ka wafer me ka ʻole o ka warp i ka wā e dicing ai, wili ʻana i ka ʻaoʻao hope, a me ka nānā ʻana. ʻO ka ikaika flexural kiʻekiʻe o ka mea (361 MPa) a me ka paʻakikī (16 GPa) e hōʻoia i ka paʻa o ka dimensional no ka manawa lōʻihi ma lalo o nā pōʻaiapuni vacuum pinepine.
Nā kikoʻī (ma muli o 99.8% Al₂O₃):
| Waiwai | Waiwai |
| Anawaena | 300 mm (12 ʻīniha) |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Palahalaha (ma luna o 300mm) | ≤5 μm |
| Ka laulā o ke awāwa | 0.5–1.0 mm |
| Mahana Hana Loa | 800°C |
| Ikaika Dielectric | 15×10⁶ V/m |
Nā noi:
ʻO ka ʻoki ʻana a me ke kahakaha ʻana i ka wafer 300mm
ʻO ka wili ʻana i ka ʻaoʻao hope o ka wafer (kākoʻo wafer lahilahi)
Ka nānā ʻana i ka ʻike maka a me ka nānā ʻana
Nā ʻūpā hoʻopaʻa/wehe i ka hoʻopaʻa manawa pōkole
Hana ʻana:
Ua wili ʻia ʻo CNC a hoʻopaʻa ʻia a hiki i ka palahalaha hope loa, ua ʻōwili ʻia me nā huila daimana, ua hoʻomaʻemaʻe ʻia me ka ultrasonically, a ua hoʻopili ʻia i loko o ka lumi maʻemaʻe Class 100. Ua nānā ʻia kēlā me kēia chuck 100% no ka palahalaha (laser interferometer) a me ka hohonu o ke awāwa (profilometer).
Nā Pōmaikaʻi:
Ka hana ʻana o nā ʻāpana haʻahaʻa (≤0.05 mau ʻāpana/cm²)
ʻAʻole i hoʻokomo i nā kemika i nā mea hoʻoheheʻe a me nā waikawa
ʻIli palekana ESD (resistivity >10¹³ Ω·cm)
Loaʻa nā ʻano hoʻohālike lua hakahaka maʻamau a me nā awa kua.
