ʻO ka mea hoʻopau keramika Silicon Carbide (SiC) - ʻOʻoleʻa kiʻekiʻe no ka lawelawe ʻana i ka wafer mahana kiʻekiʻe
Hana ʻia ka mea hoʻokō hope keramika SiC a St.Cera mai ka silicon carbide maʻemaʻe kiʻekiʻe (ʻike SiC 99.72%, Si manuahi 0.05%) me ka hoʻohana ʻana i ka mea S1111 batch. Hāʻawi ia i nā waiwai mechanical kūikawā: ikaika flexural 449 MPa (i ana ʻia), modulus elastic 457 GPa (i ana ʻia), a me ka paʻakikī Vickers 25–28 GPa (maʻamau). ʻO ka density haʻahaʻa (3.10–3.15 g/cm³, maʻamau) hāʻawi i kahi ʻoʻoleʻa kikoʻī kiʻekiʻe, kūpono no nā robots hoʻoili wafer wikiwiki. Me ka conductivity thermal o 120–150 W/m·K (maʻamau) a me ka coefficient hoʻonui thermal o 4.0–4.5 × 10⁻⁶/℃ (maʻamau), hoʻopau pono kēia mea hoʻokō hope i ka wela a mālama i ke kūpaʻa dimensional i ka wā o ka lawelawe ʻana i ka mahana kiʻekiʻe (a hiki i 1600–1700°C, ʻaʻohe ukana). ʻO ke kala ʻeleʻele/hina a me ka ʻole o ka omo wai e hōʻoia i ka launa pū ʻana o ka lumi maʻemaʻe.
Nā kikoʻī(ma muli o ka hōʻike hoʻāʻo SiC S1111 i hāʻawi ʻia a me nā waiwai maʻamau):
| Waiwai | Waiwai |
| Mea Hana | SiC (99.72% SiC, 0.05% Si manuahi) |
| Waihoʻoluʻu | ʻEleʻele/Hinahina |
| Ka nui o ka paʻa | 3.10–3.15 g/cm³ |
| Ka omo ʻana o ka wai | 0% |
| Ikaika Flexural | 449 MPa (awelika) |
| Paʻakikī o ka haki | 3.12 MPa·m¹/² (ʻawelika) |
| Modulus Elastic | 457 GPa |
| Paʻakikī Vickers | 25–28 GPa |
| Ka Hoʻokele Wela (25°C) | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5×10⁻⁶/℃ |
| Ka Mahana Hoʻohana Loa (ʻaʻohe ukana) | 1600–1700°C |
Nā noi:
● Ka lawelawe ʻana i ka wafer wela kiʻekiʻe (post-anneal, RTP, epitaxy)
● Nā keʻena etch plasma e koi ana i ke kūpaʻa kiʻekiʻe o ka erosion
● Nā lopako hoʻoili wikiwiki (māmā, paʻakikī kiʻekiʻe)
Hana ʻana:
ʻO ka pauka SiC sintering → wili CNC pololei o ka ʻaoʻao lima a me nā hiʻohiʻona kau ʻana → lapping ʻili → hoʻomaʻemaʻe ultrasonic. Nānā 100% dimensional a me ka hoʻāʻo leaka helium no nā noi vacuum.
Mana Hoʻomalu Kūlana:
● Nānā ʻana o CMM i ka lōʻihi, ka laulā, a me ka palahalaha
● Hoʻāʻo ikaika flexural i kēlā me kēia pūʻulu (e like me ke kūlana hōʻike hoʻāʻo)
● Nānā maka ma lalo o ka microscope no nā kīnā o ka ʻili
Nā pono ma mua o ka Alumina a i ʻole ka Metala:
● 2× modulus elastic kiʻekiʻe aʻe (457 vs ~380 GPa no ka alumina) - emi ka deflection
● 3× ʻoi aku ka kiʻekiʻe o ka conductivity thermal - wikiwiki ka hoʻopuehu ʻana i ka wela
● Kūpaʻa i ka >1600°C e kū'ē i ka 800°C o ka alumina i ka lewa
● Haʻahaʻa ka nui ma mua o ke kila - hōʻemi kaumaha 40%
Hoʻopilikino ʻana:
Nā lōʻihi 150–450 mm, nā ʻano o ka piko (ka paʻa ʻana o ka lihi, Bernoulli, pālahalaha), nā ʻano flange kau ʻana e like me ke kaha kiʻi OEM.
*ʻO nā ʻikepili mīkini a pau ma luna nei mai ka hōʻike hoʻāʻo i hāʻawi ʻia (batch S1111). ʻO nā waiwai wela a me ka paʻakikī he mea maʻamau no kēia papa SiC; e ʻoluʻolu e kelepona mai iā mākou no ka hōʻoia kikoʻī o ka lot.*
