ʻO ke apo hoʻokaʻawale PVD Alumina no nā ʻōnaehana hoʻokaʻawale vapor kino
Hana ʻia ke apo hoʻokaʻawale PVD a St.Cera mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃) no ka hoʻohana ʻana i nā ʻōnaehana hoʻokaʻawale mahu kino (PVD). Hāʻawi ke apo i ka hoʻokaʻawale uila ma waena o nā ʻāpana keʻena, e pale ana i ka arcing a me ka hōʻoia ʻana i ka hana plasma paʻa. ʻO nā waiwai koʻikoʻi e komo pū me ka ikaika dielectric kiʻekiʻe (15 × 10⁶ V / m), ke kū'ē kikoʻī >10¹⁴ Ω·mm² / m, a me ke kūpaʻa wela a hiki i 1600 ° C. Loaʻa i kā mākou mau hiki ke hana mīkini pololei nā diameters waho a hiki i 600mm, nā diameters o loko a hiki i 0.2mm, ka palahalaha o 0.003mm, a me ka hoʻopau ʻana o ka ʻili Ra0.1. ʻO ka porosity zero a me ka inertness kemika o ke apo e hōʻoiaʻiʻo i ka hilinaʻi lōʻihi i nā wahi sputtering aggressive.
Nā kikoʻī (ma muli o 99.8% Al₂O₃& nā hiki ke hana ʻo St.Cera):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Ikaika Dielectric | 15×10⁶ V/m |
| Ke kū'ē kiko'ī | >10¹⁴ Ω·mm²/m |
| Anawaena Waho Loa | 600mm |
| Anawaena o loko iki loa | 0.2mm |
| Mānoanoa Loa | 100mm |
| Palahalaha | 0.003mm |
| Parallelism | 0.002mm |
| Hoʻopau ʻili | Ra0.1 |
| Mahana Hana Loa | 1600°C |
Nā noi:
- · Nā mea hoʻokaʻawale papa kākoʻo pahuhopu i nā ʻōnaehana PVD
- · Nā mea hoʻokaʻawale hānai keʻena
- · Nā mea hoʻokaʻawale apo pale i nā ʻōnaehana sputtering
- · Hoʻokaʻawale uila kiʻekiʻe i loko o nā keʻena plasma
Ka pololei o ka hana ʻana:
Concentricity: 0.01mm, poepoe: 0.002mm, pololei: 0.005mm, perpendicularity: 0.005mm, i hōʻoia ʻia e CMM.
ANā pono ma luna o nā Polymer Insulators:
- · Kū i ka 1600°C vs ka palena <300°C o ka polymer
- · ʻAʻohe hoʻokuʻu ʻana i ke kinoea - mālama i ka pono o ka vacuum
- · Kūʻē i ka ʻino plasma a me ka hoʻouka kaua kemika
Hoʻopilikino ʻana:
Loaʻa nā ʻāpana kea maʻamau, nā hiʻohiʻona kau ʻana, nā ʻano ʻanuʻu, a me nā hoʻolālā apo concentric he nui.








