Papa Keramika Alumina Hoʻonohonoho Nui no nā Mea Hana Semiconductor a me nā Mea Hana ʻOihana
Hana ʻo St.Cera i nā papa keramika nui mai ka 99.8% alumina maʻemaʻe kiʻekiʻe (Al₂O₃) me nā ana kiʻekiʻe a hiki i ka 1500mm ka lōʻihi a me 600mm ka laulā. Loaʻa i kā mākou hiki ke wili pololei i ka pālahalaha o 0.003mm ma luna o 100mm a me ka parallelism o 0.002mm, e hōʻoiaʻiʻo ana i ka maikaʻi o ka ʻili no nā noi ʻāpana nui. ʻO ka mānoanoa a hiki i ka 100mm, ka hoʻopau ʻana o ka ʻili a hiki i Ra0.1. Hana kēia mau papa ma ke ʻano he kumu chuck vacuum, nā platens hoʻomehana, nā panela insulation uila, a me nā papahele keʻena hana i ka semiconductor, ka hōʻike, a me ka hana photovoltaic. Loaʻa nā lua ma o nā lua, nā counterbores, a me ka profiling lihi.
Nā kikoʻī (ma muli o 99.8% Al₂O₃& nā hiki ke hana ʻo St.Cera):
| Waiwai | Waiwai |
| Mea Hana | 99.8% Alumina (ʻAiwi ʻelepani) |
| Ka nui o ka paʻa | 3.93 g/cm³ |
| Ikaika Flexural | 361 MPa |
| Paʻakikī Vickers | 16 GPa |
| Ikaika Dielectric | 15×10⁶ V/m |
| Ka Lōʻihi Loa | 1500mm |
| Ka laulā kiʻekiʻe loa | 600mm |
| Mānoanoa Loa | 100mm |
| Palahalaha (no 100mm) | 0.003mm |
| Parallelism | 0.002mm |
| Hoʻopau ʻili | Ra0.1 (pāʻani ʻia/pololei ʻia) |
| Mahana Hana Loa | 1600°C |
Nā noi:
- · Nā papa kumu hoʻoheheʻe vacuum no nā wafers nui a me nā panela
- · Nā pā wela no nā lako hana wela
- · Nā panela insulation uila i nā ʻōnaehana voltage kiʻekiʻe
- · Nā papahele keʻena hana a me nā papa liner
Ka pololei o ka hana ʻana:
Pololei: 0.005mm, perpendicularity: 0.005mm, i hōʻoia ʻia me ka laser interferometer.
Nā Pōmaikaʻi ma luna o nā Papa Metala:
- ʻAʻohe haumia metala - koʻikoʻi no nā kaʻina hana semiconductor
- · ʻAʻohe hoʻopuka ʻana i ke kinoea - kūpono no nā wahi hakahaka
- · ʻOi aku ka maikaʻi o ke kū'ē ʻana i ka ʻaʻahu a me ke kemika
Hoʻopilikino ʻana:
Loaʻa nā ʻano lua maʻamau, nā ʻaoʻao lihi, nā ʻili hehi, a me nā wahi kau metala.
